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Home Product Toyo Air Bearing Platform
Toyo Air Bearing Platform

Air Bearing

Provided By

Toyo Automation Co,Ltd.

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Introduction

Nano accuracy positioning stage developed for semiconductor/FPD industries and features air bearing of new generation. Ultra-high 6-DOF accuracy: inearity, Flatness, Straightness, Orthogonality, Pitch, Yaw and Speed wave.

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•The throttling element is directly embedded in the motion interface of the high-precision component
•High rigidity and load capacity
•Simplify machine components
•Use the geometric precision planning of components and special mechanism design methods
•Optimized multi-axis motion accuracy
Long-term performance stability and reliability

Repeatability
< 1μmm
Semi-conductor / High Speed Pick & Place Movement
Effective Stroke
400mm
Maximum Acceleration
10G