HAL Series
SANWA ENGINEERING CORP.
The Pre Aligner covers a wide range of sizes and shapes to accurately measure the orientation of wafer placement
◆ High-resolution CCD optical identification and localization system adopted
◆ Unique algorithm for quick position and alignment
◆ Correct position determination without error even for transparent material objects
◆ Great sensing capabilities for wafers with notches or flat, dual flat or warped wafers
