Front-End Stocker System
SANWA ENGINEERING CORP.
Sanwa Front-End Stocker System (Automatic Transport and Storage System) connected with vertical furnace equipment, achieving full production process automation
◆ Customized, fully-automated 300mm wafer FOUP storage equipment for storage of up to 26 FOUPs
◆ Robotic technology and integration of multiple motion and control software technologies are used to achieve fully-automated FOUP load/unload, retrieval and tracking operations.
◆ Off-camera teaching is achieved with the camera and communication applications.
◆ N2/XCDA Purge system (optional) applied to FOUP storage to increase Q time
◆ ISO Class 5 environment
◆ FOUP temporary storage area for next lot.
◆ Device structure and communication protocol conform to SEMI Standards.
