SHUZ TUNG PCB Hybrid Optical 3D Metrology. SHUZ TUNG PCB Hybrid Optical 3D Metrology

SHUZ TUNG PCB Hybrid Optical 3D Metrology

Provided By

SHUZ TUNG(WisePioneer) MACHINERY INDUSTRIAL CO., LTD.

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Introduction

PCB 3D topography measurement equipment
According to customer needs, the size of surface topography of the PCB board can be measured.
Include the following measurement items:
Thickness Measurement (Cu)
Dimple, Recessed hole depth
Trace copper foil (width, space, thickness)
Tin pad (diameter, thickness)
Via (CD, depth)
Surface roughness (Ra,Rz,Rq,Sa,Sz,Sq)
Etching (width, space, depth), ..etc.

Description Specifications Catalogs Related Links

Product Features:
‧ High resolution, highly flexible Hybrid, Customerization.
‧ Compact Optical Module Design
‧ User-Friendly Function
‧ Wide FOV image and Regions of Interest (ROI) Function
‧ Customized Dimple Inspection & Analysis Function
‧ Load CAD/Gerber file function
‧ Customized measurement result report format and upload data output
‧ Alarm message and log file record
‧ Barcode Reader

Module	Description
Optical metrology system	1. Objective lens：2D : 5X, 2.5X, 10X ; 3D : 10X, 20X, 50X (Optional by demand) 2. Vertical Measure Range ≥50mm(w/ Z stage) 3. Lateral Spatial Resolution：0.11 μm (@50X) 4. Step Height Accuracy≤ 0.5% @ 1.8 μm VLSI SRM 5. CCD Camera Resolution：2048*2048 pixels 6. Vertical Scan Speed≥25μm/sec (Max)
XYZ Axis Stage	1. Travel Range：XY: 600mm ; Z: 50mm 2. Position Repeatability≤±1μm 3. Vacuum Chuck Flatness≤0.5mm 4. Encoder Resolution≤ 0.1μm 5. Maximum speed：XY:≥300 mm/sec ; Z: 10 mm/sec (for auto run)
Architecture, facilities	1. Machine size：WDH:1220x1420x1685 ( Machine Housing ) 2. Weight：1350kg 3. Power Requirement：220V 1Ф/12A 4. Air Requirement：100 L/min 5. vibration proof：Anti-vibration table(P.)*4 / Granite architecture

Hybrid Optical 3D Metrology

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