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Home Product SHUZ TUNG Automatic Wafer Inspection Equipment
SHUZ TUNG Automatic Wafer Inspection Equipment

WP-MM3200

Provided By

SHUZ TUNG(WisePioneer) MACHINERY INDUSTRIAL CO., LTD.

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Introduction

Applications:
Semiconductor wafer packaging, testing and related industries
Semiconductor mid-end process equipment
. Front-end process: ADI, AEI, ASI….etc.
. Advanced Packaging: Wafer Thinning, Bumping process
. For wafers: 8"" & 12""

Main functions:
Fully automatic wafer inspection (macro & micro)
According to customer needs, it can perform macroscopic inspection of wafers such as: wafer corner chipping, cracks, abnormal wafer engraving, residual tin on the edge, etc. Supplemented by AI for defect classification; at the same time, it can perform microscopic inspection of wafers such as critical dimensions, offset, etc.
It can replace manual operations, improve the speed and accuracy of wafer inspection, reduce false detection rate, and automatically report, store and analyze data. Meets the needs of smart production.

· Fully automated wafer macroscopic inspection/micro inspection measurement
· AOI+AI software defect detection and classification

Product Features:
◆Automatic macro and micro inspection for pattern and unpattern (bare wafer) wafer
◆AOI defect detection and AI-assisted classification
◆Defect Inspection
   - Micro Objective Lens: 5X, 10X, 20X, 50X, 100X or optional
   - Macro Resolution: £ 20 µm
   - Inspection Items: Wafer Top, Bottom, Side
◆Critical Dimension Measurement
   - 2D Accuracy ≦ 1 µm
   - GR&R ≦ 5%
◆Automatic Focusing: Optical Confocal and Imaging Focusing
◆Software Function: Defect Inspection, CD Measurement, SECS/GEM

Load Port
2 Port
Software Function
Defect Inspection, CD Measurement, SECS/GEM
Automatic Focusing
Optical Confocal and Imaging Focusing
Wafer Type
8", 12"
Marco Inspection A
Inspection Items: Wafer Top, Bottom, Side
Marco Inspection B
Pixel Resolution ≦ 20mm
Micro Inspection A
Objective Lens: 5X, 10X, 20X, 50X, 100X or optional
Micro Inspection B
Sensor Resolution: 9MP or optional
Image Sensor Resolution
9MP